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{| class="wikitable"
| colspan="5" |Florine ICP:  3.8mT, 50/800W, CHF3/CF4=10/30sccm, and Time=90 sec
|
|-
|Date
|Sample#
|Etch  Rate (nm/min)
|Etch  Selectivity (SiO2/PR)
|Averaged  Sidewall Angle (<sup>o</sup>)
|SEM Images
|-
|1/29/2021
|FE2102
|309
|0.99
|
|
|}

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