Other Dry Etching Recipes: Difference between revisions

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=[[CAIBE (Oxford Ion Mill)]]=
=[[CAIBE (Oxford Ion Mill)]]=
*[[media:*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool.pdf|Pt Etch Recipe]]|Pt Etch Recipe]]
*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool.pdf|Pt Etch Recipe]]|Pt Etch Recipe]]

Revision as of 21:03, 22 July 2015

Back to Dry Etching Recipes.

XeF2 Etch (Xetch)

Vapor HF Etch (uETCH)

CAIBE (Oxford Ion Mill)

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