InP etch result in details: Difference between revisions

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	[https://www.nanotech.ucsb.edu/wiki/index.php/File:~~InP_Etch_using_Unaxis_PM1_at_200_C-S9~~.pdf]		[https://www.nanotech.ucsb.edu/wiki/index.php/File:InPetS09.pdf]