UV Ozone Reactor: Difference between revisions
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==About== |
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The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment. |
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment. |
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==Documentation== |
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== Operating Procedures == |
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* [[UV Ozone Quick Start|Quick Start]] |
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*[[UV Ozone Quick Start|Quick Start]] |
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*[//www.nanotech.ucsb.edu/wiki/images/7/79/UV_Ozone_Manual_Jelight_M-144AX.pdf UV Ozone Manual] |
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Revision as of 22:33, 11 September 2019
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About
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.