Filmetrics F10-RT-UVX Operating Procedure

Standard operating Procedures for the UCSB NanoFab Filmetrics FT10-RT-UVX.

Reflectance/Transmittance Spectrum Acquisition

Startup

1. Turn on both Deuterium and Halogen lamps, and Shutter by pressing those buttons (Let the lamps be warm up at least 5 minutes before taking measurement)
2. Open FILMeasure software.
3. Choose either Transmittance or Reflectance measurement by clicking Spectra button, then, Edit Recipe button, then, Acquisition Settings tab.
4. Under Measurement Type, choose either Transmittance 0° or Reflectance 0°, then, click Apply button, then, OK button.

Transmittance measurement

1. Click on Baseline button, put the bare (no film) substrate (face down), on which the film is deposited, onto the sample stage hole. Then, click Take Transmittance Standard button. Let it finish, then, take the substrate off the stage.
2. Put Dark measurement reference sample onto the sample stage hole with the two bottom bumps fitting to the holes on the stage. Then, click Take Dark button. Let it finish, then take the Dark sample off the stage.
3. Click Finish button (this is the end of the Transmittance baseline measurement).
4. Put your film sample (face down) onto the sample stage hole, then, click Measure button. Let it finish. This is the transmittance of your sample.
5. Save the data: click File menu at the top left of the screen, then, Save Measured Spectrum tab, choose file type (.fmspe: you can open the data curve later on within the FilMeasure software only; .csv: you can read the data into a sheet using Microsoft Excel), then, type the name of the file, click Save button.
6. If you have more film samples, continue. Otherwise, turn off the lamps as well as Shutter by pressing those buttons (to save the lamp life time).
7. Finally, write your name, etc. into the logbook.

Reflectance measurement

1. Click Baseline button, then, put the sample (you want to measure the reflectance), face-down, onto the sample stage hole, then, click Take Sample Reflectance button, Let it finish, then, take the sample off the stage.
2. Put one of Reflectance Standards (BK7: for the reflectance of 0-12%; Si: for the reflectance of 12-60%; Al: for the reflectance of 60-100%) onto the sample stage with the two bottom bumps fitting into the hole on the sample stage, then, click Take Reflectance Standard button. Let it finish, then, take the standard off the stage.
3. Click Take Background button (no sample!). Let it finish.
4. Put the Dark measurement sample onto the sample stage with the two bottom bumps fitting into the holes on the stage, then, click Take Dark button. Let it finish, then, take the Dark sample off the stage.
5. Click Finish button (This is the end of Reflectance baseline measurement).
6. Click Thickness, n, k, r Tab, then, Arrow-down button of the menu, choose a Model, then, click OK button.
7. Click Edit Recipe button, then, edit the model according to your film sample (suck as film thickness unit, film stack,.
8. Click Acquisition Settings tab, then, under Measurement Type, choose Reflectance 0° (you can save your recipe into a new recipe name by clicking the icon at the top left corner of the screen), then, click OK button.
9. Put your sample, face down, onto the sample stage hole, then, click Measure button. Let it finish. This is the reflectance of your sample. You can also get the film thickness, n, k, r from the fitting to the reflectance curve.
10. Save the data: click File tab at the top left of the screen, then, Save Measured Spectrum tab, choose file type (.fmspe: you can open the data curve later on within the software; .csv: you can read the data into a sheet using Microsoft Excel), then, type the name of the file, click Save button.
11. If you have more film samples, continue. Otherwise, turn off the lamps as well as Shutter by pressing those buttons (to save the lamp lift time).
12. Finally, write your name, etc. into the logbook.