ICP Etching Recipes: Difference between revisions
Jump to navigation
Jump to search
| Line 1: | Line 1: | ||
{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
||
=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
||
==SiO Vertical Etch== |
==SiO<sub>2</sub> Vertical Etch== |
||
*[[media:Panasonic1-SiO-Etch.pdf|SiO Vertical Etch Recipe]] |
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
||
=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
||
Revision as of 20:15, 20 August 2012
Back to Dry Etching Recipes.