Lithography Recipes: Difference between revisions
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Revision as of 16:47, 9 November 2012
Lift-Off Techniques
Chemical Datasheets
| To Do: Ask Brian where these should go... |
- Positive Photoresists
- AZP4000 (AZ4110, AZ4210, AZ4330)
- OCG825
- SPR220 (SPR220-2, SPR220-7)
- SPR950-0.8
- SPR955CM (SPR955CM-0.9, SPR955CM-1.8)
- Negative Photoresists
- Underlayers
- E-beam resists
- Nanoimprinting
- Contrast Enhancement Materials
- Anti-Reflection Coatings
- Developers
- Photoresist Removers
Recipes
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.