Lithography Recipes: Difference between revisions
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==Chemical Datasheets== |
==Chemical Datasheets== |
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{{todo|Ask Brian where these should go...}} |
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;Positive Photoresists |
;Positive Photoresists |
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*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}} |
*{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}} |
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*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}} |
*{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}} |
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*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220- |
*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}} |
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*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}} |
*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}} |
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*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}} |
*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}} |
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*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}} |
*{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}} |
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*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}} |
*{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}} |
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*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2020}} |
*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}} |
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;Underlayers |
;Underlayers |
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*{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}} |
*{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}} |
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*{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}} |
*{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}} |
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*{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}} |
*{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}} |
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;Nanoimprinting |
;Nanoimprinting |
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*{{fl|NX1020-Nanoimprinting-Datasheet.pdf|NX1020}} |
*{{fl|NX1020-Nanoimprinting-Datasheet.pdf|NX1020}} |
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*{{fl|AZ300T-Resist-Remover.pdf|AZ300T}} |
*{{fl|AZ300T-Resist-Remover.pdf|AZ300T}} |
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*{{fl|PRX-127-Resist-Remover.pdf|PRX-127}} |
*{{fl|PRX-127-Resist-Remover.pdf|PRX-127}} |
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==Recipes== |
==Recipes== |
Revision as of 00:47, 14 November 2012
Lift-Off Techniques
Chemical Datasheets
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Recipes
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.