ICP Etching Recipes: Difference between revisions
Jump to navigation
Jump to search
| Line 20: | Line 20: | ||
==Si Etch (XeF2 Etch (Xetch))== |
==Si Etch (XeF2 Etch (Xetch))== |
||
*[[media:|Si Etch Recipe]] |
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
||
Revision as of 18:37, 17 September 2013
Back to Dry Etching Recipes.