ICP Etching Recipes: Difference between revisions
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{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
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=[[RIE Etch 5 (RIE#5)]]= |
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==GaN Etching (RIE#5)== |
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*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipe]] |
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=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
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==SiO<sub>2</sub> Etching (Panasonic 1)== |
==SiO<sub>2</sub> Etching (Panasonic 1)== |
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Revision as of 22:50, 19 September 2013
Back to Dry Etching Recipes.