ICP Etching Recipes: Difference between revisions
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{{recipes|Dry Etching}} |
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=[[ICP Etch 1 (Panasonic E626I)]]= |
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===InP Etch (H<sub>2</sub> Ar)=== |
===InP Etch (H<sub>2</sub> Ar)=== |
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*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
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Revision as of 16:21, 24 September 2013
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Back to Dry Etching Recipes.