ICP Etching Recipes: Difference between revisions
Jump to navigation
Jump to search
| Line 22: | Line 22: | ||
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
||
==GaN Etch (Unaxis VLR)== |
==GaN Etch (Unaxis VLR)== |
||
*[[media:|GaN Etch Recipe (85C)]] |
*[[media:09-Plasma_Etching_of_GaN-UnaxisPM1.pdf|GaN Etch Recipe (85C)]] |
||
Revision as of 21:14, 24 September 2013
Back to Dry Etching Recipes.