RIE Etching Recipes: Difference between revisions
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=[[RIE 1 (Custom)]] = |
=[[RIE 1 (Custom)]] = |
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=[[RIE 2 (MRC)]] = |
=[[RIE 2 (MRC)]] = |
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==CdZnTe Etching (RIE 2)== |
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*[[media:|CdZnTe Etch Recipes]] |
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=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
Revision as of 18:16, 27 September 2013
Back to Dry Etching Recipes.
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
- [[media:|CdZnTe Etch Recipes]]