Other Dry Etching Recipes: Difference between revisions

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=[[Vapor HF Etch (uETCH)]]=
=[[Vapor HF Etch (uETCH)]]=
*[[media:|Si Etch Recipe]]
*[[media:|SiO<sub>2</sub> Etch Recipe]]

Revision as of 00:03, 29 January 2014

Back to Dry Etching Recipes.

XeF2 Etch (Xetch)

Vapor HF Etch (uETCH)

  • [[media:|SiO2 Etch Recipe]]
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Other_Dry_Etching_Recipes&oldid=3237"