Vacuum Oven (YES): Difference between revisions

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Revision as of 17:10, 11 July 2012

Vacuum Oven (YES)
Tool Type Lithography
Location Bay 3
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Vacuum/Ammonia Oven
Manufacturer Yield Engineering Systems