Sputter 4 (AJA ATC 2200-V): Difference between revisions

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{{tool|{{PAGENAME}}
{{tool2|{{PAGENAME}}
|picture=Sputter4.jpg
|picture=Sputter4.jpg
|type = Vacuum Deposition
|type = Vacuum Deposition
|super= Adam Abrahamsen
|super= Tony Bosch
|super2= Lee Sawyer
|location=Bay 3
|location=Bay 3
|description =Seven-Target DC/RF Magnetron Sputtering System
|description =Seven-Target DC/RF Magnetron Sputtering System
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|toolid=21
|toolid=21
}}
}}
=About=
==About==
The Seven-Target DC/RF Sputtering System, built by AJA International uses planar magnetron sources. The sources are contained in tiltable sputter gun modules that allow for maintaining uniformity control at various sample heights. Cross contamination between sources is minimized by using a chimney configuration with very narrow source shutter gaps. Uniformity better than 2% is achieved for various sample heights. 2 DC sources and 1 RF sources allow for co-deposition of materials. Other materials, such as ITO, Si, Al, Zr, etc. can be reactively RF sputtered in an O<sub>2</sub> or N<sub>2</sub> environment to produce metal-oxides or nitrides. The deposition chamber is loadlocked, with automatic wafer transfer, providing for fast substrate transfer and consistent, low base pressure. Venting and evacuation are automated with a 1000 l/s magnetically levitated turbo (capable of pumping O<sub>2</sub>) achieving < 1 E-7 T ultimate pressure. A VAT gate valve is used for process pressure control independent of gas flow. Substrates are clip mounted onto 4 inch carriers. Flow rates are controlled with standard mass flow controllers. Argon and Xenon are used for the sputter gases, with N<sub>2</sub> and O<sub>2</sub> used for reactive sputtering. Gun power supplies include: 300W DC magnetron drivers, 13.56 Mhz 300W RF supplies, and a 100W substrate RF supply for in-situ substrate biasing and pre-cleaning. Samples can be heated to 700°C. The system is recipe driven and computer controlled for reproducible results. Up to 6" square wafer sizes can be accomodated in the system. Magnetic materials are restricted from this system, but can be sputter deposited in the other six-target AJA tool.
The Seven-Target DC/RF Sputtering System, built by AJA International uses planar magnetron sources. The sources are contained in tiltable sputter gun modules that allow for maintaining uniformity control at various sample heights. Cross contamination between sources is minimized by using a chimney configuration with very narrow source shutter gaps. Uniformity better than 2% is achieved for various sample heights.


Substrates are clip mounted onto 4", 6" or a generic carrier. Up to 6" round wafer sizes can be accomodated in the system.
⚫
=Detailed Specifications=

2 DC sources and 1 RF sources allow for co-deposition of materials. Materials, such as ITO, Si, Al, Zr, etc. can be reactively RF sputtered in an O<sub>2</sub> or N<sub>2</sub> environment to produce metal-oxides or nitrides. Flow rates are controlled with standard mass flow controllers. Argon is used for the sputter gases, with N<sub>2</sub> and O<sub>2</sub> used for reactive sputtering.

The deposition chamber is load-locked, with automatic wafer transfer, providing for fast substrate transfer and consistent, low base pressure. Venting and evacuation are automated with a 1200 l/s turbo (capable of pumping O<sub>2</sub>) achieving < 5 E-8T ultimate pressure. A VAT gate valve is used for process pressure control independent of gas flow.

Gun power supplies include: 300W DC, 13.56 Mhz 300W RF and a 150W substrate RF supply for in-situ substrate biasing and pre-cleaning. Samples can be heated to 800°C. The system is recipe driven and computer controlled for reproducible results.

Magnetic materials are restricted from this system, but can instead be deposited on Sputter 3 or 5. This is to accommodate superconducting materials.

⚫
==Detailed Specifications==


*7 target with DC or RF operation
*7 target with DC or RF operation
⚫
*< 5E-8T ultimate pressure (3 mT typical operating pressure), load-locked chamber
⚫
*Reactive sputtering with N<sub>2</sub> or O<sub>2</sub> using RF
⚫
*6" and 4" round sample holder
⚫
*Co-deposition of two materials: DC or RF
⚫
*No magnetic materials
⚫
*SiO<sub>2</sub>, SiN, ITO, AlN, and other metal-oxide/nitrides possible
⚫
*< E-7 T ultimate pressure (3 mT typical operating pressure), load-locked chamber
⚫
*6" square sample holder
*Gun Tilt and Sample height adjustment
*Gun Tilt and Sample height adjustment
*Deposition uniformity is ~ 1-2% over 4 " diameter
*Deposition uniformity is ~ 1-2% over 4 " diameter
*Up to 700°C dep temperature in O<sub>2</sub> environment
*Up to 800°C deposition temperature in O<sub>2</sub> environment
*RF Biasing of sample during deposition
*RF Biasing of sample during deposition or as a preclean
*Automatic wafer loading and recipe driiven or manual computer control.
*Automatic wafer loading and recipe driven process control.
⚫
*Co-deposition of two materials: DC or RF
⚫
*Reactive sputtering with N<sub>2</sub> or O<sub>2</sub> using RF
⚫
*SiO<sub>2</sub>, SiN, ITO, AlN, and other metal-oxide/nitrides possible
⚫
*'''No magnetic materials'''
*[https://signupmonkey.ece.ucsb.edu/cgi-bin/users/browse.cgi?tool_ID=21&B1=Show '''The Sputter #4 SignupMonkey Page'''] lists the currently installed sputter targets.

==Procedures==
''To Be Added''

=== Online Training Video: ===

**[https://gauchocast.hosted.panopto.com/Panopto/Pages/Viewer.aspx?id=93633088-cab6-46eb-b200-ae1d010d04f1&start=0 <u>AJA Sputter System Training</u>]
**'''Important:''' ''This video is for reference only, and does not give you authorization to use the tool. You must be officially authorized by the supervisor before using this machine.''

==Recipes==
Wiki > Recipes > Sputtering Recipes > [[Sputtering Recipes#Sputter 4 .28AJA ATC 2200-V.29|'''<u>Sputter #4</u>''']]

See the [[Vacuum Deposition Recipes|master deposition table]] to help determine which tool you need to use for a particular material.

Latest revision as of 17:37, 30 August 2022

Sputter 4 (AJA ATC 2200-V)
Sputter4.jpg
Location Bay 3
Tool Type Vacuum Deposition
Manufacturer AJA
Description Seven-Target DC/RF Magnetron Sputtering System
Primary Supervisor Tony Bosch
(805) 893-3486
bosch@ece.ucsb.edu

Secondary Supervisor

Lee Sawyer

Recipes Vacuum Deposition Recipes
SignupMonkey: Sign up for this tool


About

The Seven-Target DC/RF Sputtering System, built by AJA International uses planar magnetron sources. The sources are contained in tiltable sputter gun modules that allow for maintaining uniformity control at various sample heights. Cross contamination between sources is minimized by using a chimney configuration with very narrow source shutter gaps. Uniformity better than 2% is achieved for various sample heights.

Substrates are clip mounted onto 4", 6" or a generic carrier. Up to 6" round wafer sizes can be accomodated in the system.

2 DC sources and 1 RF sources allow for co-deposition of materials. Materials, such as ITO, Si, Al, Zr, etc. can be reactively RF sputtered in an O2 or N2 environment to produce metal-oxides or nitrides. Flow rates are controlled with standard mass flow controllers. Argon is used for the sputter gases, with N2 and O2 used for reactive sputtering.

The deposition chamber is load-locked, with automatic wafer transfer, providing for fast substrate transfer and consistent, low base pressure. Venting and evacuation are automated with a 1200 l/s turbo (capable of pumping O2) achieving < 5 E-8T ultimate pressure. A VAT gate valve is used for process pressure control independent of gas flow.

Gun power supplies include: 300W DC, 13.56 Mhz 300W RF and a 150W substrate RF supply for in-situ substrate biasing and pre-cleaning. Samples can be heated to 800°C. The system is recipe driven and computer controlled for reproducible results.

Magnetic materials are restricted from this system, but can instead be deposited on Sputter 3 or 5. This is to accommodate superconducting materials.

Detailed Specifications

  • 7 target with DC or RF operation
  • < 5E-8T ultimate pressure (3 mT typical operating pressure), load-locked chamber
  • 6" and 4" round sample holder
  • Gun Tilt and Sample height adjustment
  • Deposition uniformity is ~ 1-2% over 4 " diameter
  • Up to 800°C deposition temperature in O2 environment
  • RF Biasing of sample during deposition or as a preclean
  • Automatic wafer loading and recipe driven process control.
  • Co-deposition of two materials: DC or RF
  • Reactive sputtering with N2 or O2 using RF
  • SiO2, SiN, ITO, AlN, and other metal-oxide/nitrides possible
  • No magnetic materials
  • The Sputter #4 SignupMonkey Page lists the currently installed sputter targets.

Procedures

To Be Added

Online Training Video:

    • AJA Sputter System Training
    • Important: This video is for reference only, and does not give you authorization to use the tool. You must be officially authorized by the supervisor before using this machine.

Recipes

Wiki > Recipes > Sputtering Recipes > Sputter #4

See the master deposition table to help determine which tool you need to use for a particular material.

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