InP etch result in details: Difference between revisions

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	[https://~~www~~.nanotech.ucsb.edu/~~wiki~~/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-S9.pdf]		https://wiki.nanotech.ucsb.edu/w/index.php?title=File:InP_Etch_using_Unaxis_PM1_at_200_C-2.pdf