Other Dry Etching Recipes: Difference between revisions
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=[[CAIBE (Oxford Ion Mill)]]= |
=[[CAIBE (Oxford Ion Mill)]]= |
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*[[media:*[[media:|Pt Etch Recipe]]|Pt Etch Recipe]] |
*[[media:*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool.pdf|Pt Etch Recipe]]|Pt Etch Recipe]] |
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Revision as of 21:02, 22 July 2015
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
CAIBE (Oxford Ion Mill)
- [[media:*Pt Etch Recipe|Pt Etch Recipe]]