Template:Announcements: Difference between revisions
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[[User:Silva|Silva]] 21:51, 11 February 2019 (PST) |
[[User:Silva|Silva]] 21:51, 11 February 2019 (PST) |
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===== ALD Metal Dep ===== |
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The replacement turbo pump has arrived. We will finish the turbo installation Thursday February 14th. |
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[[User:Silva|Silva]] 21:38, 13 February 2019 (PST) |
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===== E-Beam#1 ===== |
===== E-Beam#1 ===== |
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Revision as of 17:10, 15 February 2019
Equipment Status
Suss Bonder
Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. Silva 21:36, 13 February 2019 (PST)
KLA Tencor Surfscan
The system is down. The vendor has located a replacement PCB. Once the board is secured, the vendor will schedule a visit and finish the system repairs. Silva 21:51, 11 February 2019 (PST)
E-Beam#1
The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. Silva 21:45, 11 February 2019 (PST)