Template:Announcements: Difference between revisions
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[[User:Silva|Silva]] 10:45, 12 April 2019 (PDT) |
[[User:Silva|Silva]] 10:45, 12 April 2019 (PDT) |
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===== SLR Fluorine ICP Etch ===== |
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The system will be down Monday May 13 and Tuesday May 14, 2019 to integrate a new maglev turbo pump. |
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We'll be taking the MA-6 down for the day this Monday to address the intensity issue with Channel 1. If all goes well the tool should be up by noon, but we are allotting extra time in case any issues arise. |
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[[User:Silva|Silva]] |
[[User:Silva|Silva]] 07:15, 2 May 2019 (PDT) |
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<!---------- end of Equipment Status ------------> |
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Revision as of 14:15, 2 May 2019
Equipment Status
Suss Bonder
Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)
SLR Fluorine ICP Etch
The system will be down Monday May 13 and Tuesday May 14, 2019 to integrate a new maglev turbo pump. Silva 07:15, 2 May 2019 (PDT)