Template:Announcements: Difference between revisions
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===== SLR Fluorine ICP Etch ===== |
===== SLR Fluorine ICP Etch ===== |
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The system will be down |
The system will be down May 23 and May 24, 2019 to integrate a new maglev turbo pump. |
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[[User:Silva|Silva]] 07:15, 2 May 2019 (PDT) |
[[User:Silva|Silva]] 07:15, 2 May 2019 (PDT) |
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Revision as of 19:29, 2 May 2019
Equipment Status
Suss Bonder
Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)
SLR Fluorine ICP Etch
The system will be down May 23 and May 24, 2019 to integrate a new maglev turbo pump. Silva 07:15, 2 May 2019 (PDT)