UV Ozone Reactor: Difference between revisions
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{{ |
{{tool2|{{PAGENAME}} |
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|picture=Ozone.jpg |
|picture=Ozone.jpg |
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|type = Dry Etch |
|type = Dry Etch |
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|super= Lee Sawyer |
|super= Lee Sawyer |
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|super2= Tony Bosch |
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|model=M-144AX |
|model=M-144AX |
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|location=Bay 5 |
|location=Bay 5 |
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Revision as of 17:52, 30 August 2022
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About
The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.