Template:Announcements: Difference between revisions
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===== Unaxis Etch: Down ===== |
===== Unaxis Etch: Down ===== |
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We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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Revision as of 15:19, 21 March 2023
FEI SEM#1 Replacement Project
The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. //Vraj Mehalana 10:55, 16 March 2023 (PDT)
Unaxis Etch: Down
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony // John d 09:35, 13 February 2023 (PST)
Dektak XT ready for training
We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please contact the tool supervisor. // John d 10:08, 7 February 2023 (PST)
Au Plating: UP
only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. // Vraj Mehalana 12:35, 15 March 2023 (PDT)