YES-SPR220-Various-Temps: Difference between revisions
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Pressure drop indicates completion of etch. Once pressure flattens etching is complete. |
Pressure drop indicates completion of etch. Once pressure flattens etching is complete. |
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[[File:YES-SPR220vsTemp.jpg|578x578px]] |
[[File:YES-SPR220vsTemp.jpg|578x578px]]<br /> |
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[[File:PPR 220-7 Etch Rates vs Temperature.jpg|left|thumb|572x572px|alt=|Oxygen only recipes, 3KW power, O2 2000sccm]] |
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Latest revision as of 16:53, 5 June 2023
Pressure drop indicates completion of etch. Once pressure flattens etching is complete.
