ICP Etching Recipes: Difference between revisions

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=[[ICP Etch 2 (Panasonic E640)]]=
=[[ICP Etch 2 (Panasonic E640)]]=
==SiOx Vertical Etch==
*[[media:Panasonic2-SiOx-Recipe.pdf|SiOx Vertical Etch Recipe]]

=[[ICP-Etch (Unaxis VLR)]]=
=[[ICP-Etch (Unaxis VLR)]]=

Revision as of 15:58, 20 August 2012

Back to Dry Etching Recipes.

ICP Etch 1 (Panasonic E626I)

SiO Vertical Etch

ICP Etch 2 (Panasonic E640)

SiOx Vertical Etch

ICP-Etch (Unaxis VLR)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=ICP_Etching_Recipes&oldid=2014"