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=== SiN (2% SiH<sub>4</sub> - No-Ar) === |
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=== SiN (2% SiH<sub>4</sub> - No-Ar) === |
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{| border="1" class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" |
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*50° |
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**[[Media:PECVD2-SiN-Recipe-NoAr-5W- 50C-High-Stress.pdf|SiN Deposition Recipe - No Ar (5W 50° High Stress)]] |
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!width=350 align=center|50° |
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**[[Media:PECVD2-SiN-Recipe-NoAr-50W-50C-Medium-Stress.pdf|SiN Deposition Recipe - No Ar (50W 50° Medium Stress)]] |
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!width=350 align=center|100° |
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**[[Media:PECVD2-SiN-Recipe-NoAr-120W- 50C-Low-Stress.pdf|SiN Deposition Recipe - No Ar (120W 50° Low Stress)]] |
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!width=350 align=center|250° |
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*100°C |
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|-align=left |
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**[[Media:PECVD2-SiN-Recipe-NoAr- 5W-100C- High-Stress.pdf|SiN Deposition Recipe - No Ar ( 5W 100° High Stress)]] |
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**[[Media:PECVD2-SiN-Recipe-NoAr-50W- 100C-Medium-Stress.pdf|SiN Deposition Recipe - No Ar (50W 100° Medium Stress)]] |
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**[[Media:PECVD2-SiN-Recipe-NoAr-120W-100C-Low-Stress.pdf|SiN Deposition Recipe - No Ar (120W 100° Low Stress)]]
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*[[Media:PECVD2-SiN-Recipe-NoAr-5W-50C-High-Stress.pdf|SiN Deposition Recipe - No Ar (5W 50° High Stress)]] |
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⚫ |
*[[Media:PECVD2-SiN-Recipe-NoAr-50W-50C-Medium-Stress.pdf|SiN Deposition Recipe - No Ar (50W 50° Medium Stress)]] |
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*250°C |
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**[[Media:PECVD2-SiN-Recipe-NoAr-5W-250C-High-Stress.pdf|SiN Deposition Recipe - No Ar (5W 250° High Stress)]]
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*[[Media:PECVD2-SiN-Recipe-NoAr-120W-50C-Low-Stress.pdf|SiN Deposition Recipe - No Ar (120W 50° Low Stress)]] |
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| ⚫ |
**[[Media:PECVD2-SiN-Recipe-NoAr- 50W-250C- Medium-Stress.pdf|SiN Deposition Recipe - No Ar ( 50W 250° Medium Stress)]] |
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**[[Media:PECVD2-SiN-Recipe-NoAr-120W-250C-Low-Stress.pdf|SiN Deposition Recipe - No Ar (120W 250° Low Stress)]]
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*[[Media:PECVD2-SiN-Recipe-NoAr-5W-100C-High-Stress.pdf|SiN Deposition Recipe - No Ar (5W 100° High Stress)]] |
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⚫ |
*[[Media:PECVD2-SiN-Recipe-NoAr- 50W-100C- Medium-Stress.pdf|SiN Deposition Recipe - No Ar ( 50W 100° Medium Stress)]] |
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⚫ |
*[[Media:PECVD2-SiN-Recipe-NoAr-120W- 100C-Low-Stress.pdf|SiN Deposition Recipe - No Ar (120W 100° Low Stress)]] |
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⚫ |
*[[Media:PECVD2-SiN-Recipe-NoAr-5W- 250C-High-Stress.pdf|SiN Deposition Recipe - No Ar (5W 250° High Stress)]] |
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⚫ |
*[[Media:PECVD2-SiN-Recipe-NoAr-50W- 250C-Medium-Stress.pdf|SiN Deposition Recipe - No Ar (50W 250° Medium Stress)]] |
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*[[Media:PECVD2-SiN-Recipe-NoAr- 120W-250C- Low-Stress.pdf|SiN Deposition Recipe - No Ar ( 120W 250° Low Stress)]] |
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=== SiN (2% SiH<sub>4</sub> - No-Ar - Extra N<sub>2</sub>) === |
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=== SiN (2% SiH<sub>4</sub> - No-Ar - Extra N<sub>2</sub>) === |
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{| border="1" class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" |
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*50° |
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|- bgcolor="#D0E7FF" |
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**[[Media:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-50C-Low-Stress.pdf|SiN Deposition Recipe - No Ar - Extra N<sub>2</sub> (120W 50° Low Stress)]] |
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!width=350 align=center|50° |
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*100°C |
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!width=350 align=center|100° |
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**[[Media:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-100C-Low-Stress.pdf|SiN Deposition Recipe - No Ar - Extra N<sub>2</sub> (120W 100° Low Stress)]] |
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!width=350 align=center|250° |
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*250°C |
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|-align=left |
| ⚫ |
**[[Media:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-250C-Low-Stress.pdf|SiN Deposition Recipe - No Ar - Extra N<sub>2</sub> (120W 250° Low Stress)]] |
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*[[Media:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-50C-Low-Stress.pdf|SiN Deposition Recipe - No Ar Extra N<sub>2</sub> (120W 50° Low Stress)]] |
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*[[Media:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-100C-Low-Stress.pdf|SiN Deposition Recipe - No Ar Extra N<sub>2</sub> (120W 100° Low Stress)]] |
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*[[Media:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-250C-Low-Stress.pdf|SiN Deposition Recipe - No Ar Extra N<sub>2</sub> (120W 250° Low Stress)]] |
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