Lithography Recipes: Difference between revisions

Revision as of 20:34, 8 November 2012

Lift-Off Techniques

Recipes

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Lithography Recipes
	Contact Aligners		Steppers			Flood Expose	E-Beam Lithography
Positive Resists	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
AZ4110	R1	R1
AZ4210	R1	R1
AZ4330RS	R1	R1
OCG 825-35CS
SPR 950-0.8
SPR 955 CM-0.9
SPR 955 CM-1.8
SPR 220-3.0	R1	R1
SPR 220-7.0	R1	R1
THMR-IP3600 HP D
UV6-0.7
Negative Resists	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
AZ5214-EIR	R1	R1
AZnLOF 2020	R1	R1
AZnLOF 2035
AZnLOF 2070
AZnLOF P5510
UVN30-0.5
SU-8 2015
Underlayers	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
PMGI SF-11
PMGI SF-15
LOL 2000
XHRIC-11 (BARC)
AR-2 (BARC)
DS-K 101-307 (BARC)
Overlayers	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
CEM-365 IS
E-Beam Resists	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
??????
???????
Nanoimprint Resists	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
MR-I 7020
Nanonex NX-1020
	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)

@@ Line 19: / Line 19: @@
 | bgcolor="#D0E7FF" align="center" | AZ4110
 | bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
-| bgcolor="EEFFFF" |
+| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 | bgcolor="EEFFFF" |
 | bgcolor="EEFFFF" |
@@ Line 29: / Line 29: @@
 | bgcolor="#D0E7FF" align="center" | AZ4210
 | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
-| <br>
 | <br>
 | <br>
@@ Line 39: / Line 39: @@
 | bgcolor="#D0E7FF" align="center" | AZ4330RS
 | bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
-| bgcolor="EEFFFF" |
+| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 | bgcolor="EEFFFF" |
 | bgcolor="EEFFFF" |
@@ Line 89: / Line 89: @@
 | bgcolor="#D0E7FF" align="center" | SPR 220-3.0
 | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+| {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
-| <br>
 | <br>
 | <br>
@@ Line 99: / Line 99: @@
 | bgcolor="#D0E7FF" align="center" | SPR 220-7.0
 | bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
-| bgcolor="EEFFFF" |
+| bgcolor="EEFFFF" | {{rl|Contact_Alignment_Recipes|Positive Resist (MA-6)}}
 | bgcolor="EEFFFF" |
 | bgcolor="EEFFFF" |
@@ Line 131: / Line 131: @@
 |-bgcolor="EEFFFF"
 | bgcolor="#D0E7FF" align="center" | AZ5214-EIR
-| {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+| {{rl|Contact_Alignment_Recipes|Negative Resist (MJB-3)}}
+| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
-|
 |
 |
@@ Line 142: / Line 142: @@
 | bgcolor="#D0E7FF" align="center" | AZnLOF 2020
 | {{rl|Contact_Alignment_Recipes|Positive Resist (MJB-3)}}
+| {{rl|Contact_Alignment_Recipes|Negative Resist (MA-6)}}
-|
 |
 |

Lithography Recipes: Difference between revisions

Revision as of 20:34, 8 November 2012

Lift-Off Techniques

Recipes

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