Sputter 5 (AJA ATC 2200-V): Difference between revisions

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Revision as of 17:49, 14 June 2013

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Sputter 5 (AJA ATC 2200-V)
Sputter5.jpg
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Mike Silva
Supervisor Phone (805) 893-3096
Supervisor E-Mail silva@ece.ucsb.edu
Description ?
Manufacturer Kurt J Lesker
Vacuum Deposition Recipes


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