Difference between revisions of "ICP Etching Recipes"
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===InP Etch (H<sub>2</sub> Ar)=== |
===InP Etch (H<sub>2</sub> Ar)=== |
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*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
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=[[XeF2 Etch (Xetch))]]= |
=[[XeF2 Etch (Xetch))]]= |
Revision as of 15:54, 18 September 2013
Back to Dry Etching Recipes.