ICP Etching Recipes: Difference between revisions
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*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]] |
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=[[XeF<sub>2</sub> Etch (Xetch |
=[[XeF<sub>2</sub> Etch (Xetch)]]= |
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*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
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Revision as of 22:56, 18 September 2013
Back to Dry Etching Recipes.