Difference between revisions of "ICP Etching Recipes"
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{{recipes|Dry Etching}} |
{{recipes|Dry Etching}} |
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+ | =[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
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+ | ==Single-step Si Etching (not Bosch!) (Si Deep RIE)== |
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+ | *[[media:|Single-step Si Vertical Etch Recipe]] |
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+ | |||
=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
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==SiO<sub>2</sub> Etching (Panasonic 1)== |
==SiO<sub>2</sub> Etching (Panasonic 1)== |
Revision as of 09:57, 25 September 2013
Back to Dry Etching Recipes.
Si Deep RIE (PlasmaTherm/Bosch Etch)
Single-step Si Etching (not Bosch!) (Si Deep RIE)
- [[media:|Single-step Si Vertical Etch Recipe]]