Lithography Recipes: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
 
No edit summary
Line 1: Line 1:
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="wikitable"
{{WIP}}
|- bgcolor="#D0E7FF"

! width="1675" height="45" colspan="9" | <div style="font-size: 150%;">Lithography Recipes</div>
*[[ASML Recipes]]
|- bgcolor="#D0E7FF"
*[[GCA Stepper Recipes]]
| <!-- INTENTIONALLY LEFT BLANK --> <br>
*[[Contact Lithography Recipes]]
! bgcolor="#D0E7FF" align="center" colspan="2" | '''[[Contact Alignment Recipes|Contact Aligners]]'''
*[[Nanoimprint Recipes]]
! bgcolor="#D0E7FF" align="center" colspan="3" | '''[[Stepper Recipes|Steppers]]'''
*[[Optical Bi-Layer Recipes]]
! width="90" bgcolor="#D0E7FF" align="center" | '''[[Flood Exposure Recipes|Flood Expose]]'''
*[[E-Beam Lithography Recipes]]
! bgcolor="#D0E7FF" align="center" colspan="2" | '''[[E-Beam Lithography Recipes|E-Beam Lithography]]'''
*[[Lab Techniques]]
|-
*[[Resist Stripping]]
! width="20" bgcolor="#D0E7FF" align="center" | '''Positive Resists'''
*[[Lithography Chemicals]]
{{LithRecipe Table}}
|-
| bgcolor="#D0E7FF" align="center" | AZ4110
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
| bgcolor="#D0E7FF" align="center" | AZ4210
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
|-
| bgcolor="#D0E7FF" align="center" | AZ4330RS
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
| bgcolor="#D0E7FF" align="center" | OCG 825-35CS
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
|-
| bgcolor="#D0E7FF" align="center" | SPR 950-0.8
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-0.9
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
|-
| bgcolor="#D0E7FF" align="center" | SPR 955 CM-1.8
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
| bgcolor="#D0E7FF" align="center" | SPR 220-3.0
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
|-
| bgcolor="#D0E7FF" align="center" | SPR 220-7.0
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
| bgcolor="#D0E7FF" align="center" | THMR-IP3600 HP D
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
|-
| bgcolor="#D0E7FF" align="center" |UV6-0.7
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" | '''Negative Resists'''
{{LithRecipe Table}}
|-
| bgcolor="#D0E7FF" align="center" | AZ5214-EIR
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
|-
| bgcolor="#D0E7FF" align="center" | AZnLOF 2020
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
| bgcolor="#D0E7FF" align="center" | AZnLOF 2035
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
|-
| bgcolor="#D0E7FF" align="center" | AZnLOF 2070
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
| bgcolor="#D0E7FF" align="center" | AZnLOF P5510
|
|
|
|
|
|
|
|
|-
| bgcolor="#D0E7FF" align="center" | UVN30-0.5
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
| bgcolor="#D0E7FF" align="center" | SU-8 2015
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
|
|
|
|
|
|
|
|
|-
! bgcolor="#D0E7FF" align="center" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
| bgcolor="EEFFFF" |
|-
! bgcolor="#D0E7FF" align="center" |
{{LithRecipe Table}}
|}

Revision as of 14:47, 21 August 2012

Lithography Recipes

 Contact Aligners Steppers Flood Expose E-Beam Lithography
Positive Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)
AZ4110
AZ4210







AZ4330RS
OCG 825-35CS







SPR 950-0.8
SPR 955 CM-0.9







SPR 955 CM-1.8
SPR 220-3.0







SPR 220-7.0
THMR-IP3600 HP D







UV6-0.7
Negative Resists SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)
AZ5214-EIR







AZnLOF 2020
AZnLOF 2035







AZnLOF 2070
AZnLOF P5510
UVN30-0.5
SU-8 2015
SUSS MJB-3 SUSS MA-6 Stepper 1
(GCA 6300) 		Stepper 2
(AutoStep 200) 		Stepper 3
(ASML DUV) 		MLA150
(Heidelberg)
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Lithography_Recipes&oldid=2066"