Other Dry Etching Recipes: Difference between revisions
Jump to navigation
Jump to search
| Line 9: | Line 9: | ||
=[[CAIBE (Oxford Ion Mill)]]= |
=[[CAIBE (Oxford Ion Mill)]]= |
||
*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf|Pt Etch Recipe]] |
*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf|Pt Etch Recipe]] |
||
*[[media:|Au Etch Recipe]] |
|||
Revision as of 22:53, 9 October 2015
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
CAIBE (Oxford Ion Mill)
- Pt Etch Recipe
- [[media:|Au Etch Recipe]]