Sputter 5 (AJA ATC 2200-V): Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 9: Line 9:
|picture=Sputter5.jpg
|picture=Sputter5.jpg
|type = Vacuum Deposition
|type = Vacuum Deposition
|super= Mike Silva
|super= Tony Bosch
|location=Bay 3
|location=Bay 3
|description = ?
|description = ?
|manufacturer = Kurt J Lesker
|manufacturer = AJA ATC 2200-V
|materials =
|materials =
|toolid=
|toolid=

Revision as of 17:58, 1 May 2018

==

Heading text

==

Heading text
====
==
Sputter 5 (AJA ATC 2200-V)
Sputter5.jpg
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ?
Manufacturer AJA ATC 2200-V
Vacuum Deposition Recipes


Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Sputter_5_(AJA_ATC_2200-V)&oldid=155073"