InP etch result in details: Difference between revisions

Revision as of 15:02, 2 May 2018

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			[https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-S9.pdf]
	[[:File:InP Etch using Unaxis PM1 at 200 C-S9.pdf]]