InP etch result in details: Difference between revisions

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	https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-2.~~docx~~		https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-2.pdf