InP Etch Rate and Selectivity (InP/SiO2): Difference between revisions
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|Selectivity (InP/SiO2) |
|Selectivity (InP/SiO2) |
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|10/4/2016 |
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|InP#1613 |
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|0.92 |
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|8.9 |
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|12/1/2016 |
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|InP#1614 |
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|0.96 |
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|12.1 |
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|12/15/2016 |
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|InP#1615 |
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|0.91 |
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|9.3 |
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|1/23/2017 |
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|InP#1701 |
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|0.93 |
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|9.4 |
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|2/7/2017 |
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|InP#1702 |
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|0.75 |
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|7.7 |
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|2/21/2017 |
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|InP#1703 |
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|0.91 |
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|11.3 |
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|3/21/2017 |
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|InP#1704 |
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|1.01 |
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|11.3 |
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|4/20/2017 |
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|inP#1705 |
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|0.88 |
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|10.2 |
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|5/4/2017 |
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|InP#1706 |
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|0.84 |
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|11 |
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|5/19/2017 |
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|InP#1707 |
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|0.82 |
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|9.9 |
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|7/6/2017 |
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|InP#1708 |
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|0.98 |
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|12.1 |
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|8/16/2017 |
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|InP#1709 |
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|0.76 |
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|8 |
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|8/28/2017 |
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|InP#1710 |
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|1 |
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|11.7 |
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|10/11/2017 |
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|InP#1711 |
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|1 |
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|11 |
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|10/23/2017 |
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|InP#1712 |
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|1.11 |
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|13.1 |
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|11/21/2017 |
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|InP#1713 |
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|1.04 |
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|12.1 |
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|12/7/2017 |
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|InP#1714 |
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|0.96 |
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|10.4 |
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|1/2/2018 |
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|InP#1801 |
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|1.44 |
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|14.3 |
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|3/1/2018 |
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|InP#1802 |
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|0.96 |
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|9 |
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|4/5/2018 |
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|InP#1803 |
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|1.05 |
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|11.9 |
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|4/10/2018 |
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|InP#1804 |
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|1.12 |
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|12.8 |
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|4/26/2018 |
|4/26/2018 |
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Revision as of 18:05, 2 May 2018
| 1.4 mT, 125/800W, Cl2/H2/Ar flow-rate=6.3/12.7/2 sccm, chuck temperature=200 C, and etch time=90s (Prior to the etch, do O2 plasma chamber clean for 15 minutes, then, chamber coating with the same recipe and a quarter dummy InP on carrier for 15 minutes. | |||
| Date | Sample# | InP Etch Rate (mm/min) | Selectivity (InP/SiO2) |
| 10/4/2016 | InP#1613 | 0.92 | 8.9 |
| 12/1/2016 | InP#1614 | 0.96 | 12.1 |
| 12/15/2016 | InP#1615 | 0.91 | 9.3 |
| 1/23/2017 | InP#1701 | 0.93 | 9.4 |
| 2/7/2017 | InP#1702 | 0.75 | 7.7 |
| 2/21/2017 | InP#1703 | 0.91 | 11.3 |
| 3/21/2017 | InP#1704 | 1.01 | 11.3 |
| 4/20/2017 | inP#1705 | 0.88 | 10.2 |
| 5/4/2017 | InP#1706 | 0.84 | 11 |
| 5/19/2017 | InP#1707 | 0.82 | 9.9 |
| 7/6/2017 | InP#1708 | 0.98 | 12.1 |
| 8/16/2017 | InP#1709 | 0.76 | 8 |
| 8/28/2017 | InP#1710 | 1 | 11.7 |
| 10/11/2017 | InP#1711 | 1 | 11 |
| 10/23/2017 | InP#1712 | 1.11 | 13.1 |
| 11/21/2017 | InP#1713 | 1.04 | 12.1 |
| 12/7/2017 | InP#1714 | 0.96 | 10.4 |
| 1/2/2018 | InP#1801 | 1.44 | 14.3 |
| 3/1/2018 | InP#1802 | 0.96 | 9 |
| 4/5/2018 | InP#1803 | 1.05 | 11.9 |
| 4/10/2018 | InP#1804 | 1.12 | 12.8 |
| 4/26/2018 | InP#1805 | 1.29 | 13.6 |
