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	[https://www.nanotech.ucsb.edu/wiki/images/a/a4/~~InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf-4.pdf https://www.nanotech.ucsb.edu/wiki/index.php/File:~~InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf]		[https://www.nanotech.ucsb.edu/wiki/images/a/a4/InP_Etch_using_Unaxis_PM1_at_200_C-4.pdf]