Template:Announcements: Difference between revisions
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===== ALD Metal Dep ===== |
===== ALD Metal Dep ===== |
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The system is down. |
The system is down. A turbo pump has been sourced, and should be here Thursday February 14th. |
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[[User:Silva|Silva]] |
[[User:Silva|Silva]] 21:45, 11 February 2019 (PST) |
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===== E-Beam#1 ===== |
===== E-Beam#1 ===== |
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The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. |
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[[User:Silva|Silva]] |
[[User:Silva|Silva]] 21:45, 11 February 2019 (PST) |
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===== Vapor HF Etch ===== |
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The HF bottle is empty. The bottle will be replaced Wednesday February 13th. |
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[[User:Silva|Silva]] 21:45, 11 February 2019 (PST) |
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Revision as of 05:45, 12 February 2019
Equipment Status
Suss Bonder
The system is down. We are waiting for fieldservce. Silva 10:18, 4 February 2019 (PST)
KLA Tencor Surfscan
The system is down. We are sourcing a replacement PCB. Silva 10:20, 4 February 2019 (PST)
ALD Metal Dep
The system is down. A turbo pump has been sourced, and should be here Thursday February 14th. Silva 21:45, 11 February 2019 (PST)
E-Beam#1
The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. Silva 21:45, 11 February 2019 (PST)
Vapor HF Etch
The HF bottle is empty. The bottle will be replaced Wednesday February 13th. Silva 21:45, 11 February 2019 (PST)