Template:Announcements: Difference between revisions
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The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. |
The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. |
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// [[User:Silva|Silva]] 21:45, 11 February 2019 (PST) |
// [[User:Silva|Silva]] 21:45, 11 February 2019 (PST) |
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===== PECVD#1 ===== |
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The system is down. There is a pumping issue with the tool. The issue will be addressed Tuesday. |
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[[User:Silva|Silva]] 16:32, 17 February 2019 (PST) |
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===== RIE#5 ===== |
===== RIE#5 ===== |
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Revision as of 19:09, 18 February 2019
Equipment Status
Suss Bonder
Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)
KLA Tencor Surfscan
The system is down. The vendor has located a replacement PCB. Once the board is secured, the vendor will schedule a visit and finish the system repairs. // Silva 21:51, 11 February 2019 (PST)
E-Beam#1
The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. // Silva 21:45, 11 February 2019 (PST)
RIE#5
The system is down. The system has a wafer transfer error. The system will be looked at tomorrow. Silva 10:11, 18 February 2019 (PST)
IBD
The system is down. The load lock ion gauge has failed. The gauge will be replaced tomorrow. Silva 10:11, 18 February 2019 (PST)
ASML DUV: PM March 12 to 15th
ASML will be performing their periodic maintenance on the DUV stepper from Tuesday March 12th through Friday March 15th. Please schedule your work accordingly. // John d 11:02, 15 February 2019 (PST)