Template:Announcements: Difference between revisions
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The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. |
The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. |
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// [[User:Silva|Silva]] 21:45, 11 February 2019 (PST) |
// [[User:Silva|Silva]] 21:45, 11 February 2019 (PST) |
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===== ICP Panasonic#1 ===== |
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The system is down. There is a lost wafer in the process chamber. Don will address the issue on Monday. |
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[[User:Silva|Silva]] 20:57, 23 February 2019 (PST) |
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===== ASML DUV: PM March 12 to 15th ===== |
===== ASML DUV: PM March 12 to 15th ===== |
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Revision as of 04:57, 24 February 2019
Equipment Status
Suss Bonder
Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)
E-Beam#1
The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. // Silva 21:45, 11 February 2019 (PST)
ICP Panasonic#1
The system is down. There is a lost wafer in the process chamber. Don will address the issue on Monday. Silva 20:57, 23 February 2019 (PST)
ASML DUV: PM March 12 to 15th
ASML will be performing their periodic maintenance on the DUV stepper from Tuesday March 12th through Friday March 15th. Please schedule your work accordingly. // John d 11:02, 15 February 2019 (PST)