Template:Announcements: Difference between revisions
No edit summary |
No edit summary |
||
| Line 41: | Line 41: | ||
[[User:Silva|Silva]] 11:50, 7 March 2019 (PST) |
[[User:Silva|Silva]] 11:50, 7 March 2019 (PST) |
||
===== RIE#2 ===== |
|||
The system is down for front panel switch failure. The issue will be addressed tomorrow. |
|||
[[User:Silva|Silva]] 17:34, 7 March 2019 (PST) |
|||
<!---------- end of Equipment Status ------------> |
<!---------- end of Equipment Status ------------> |
||
Revision as of 01:34, 8 March 2019
Equipment Status
Suss Bonder
Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)
E-Beam#1
The power supply and IC5 controller retrofit is complete. Every user will need to be trained to use the tool. It is now similar to E-beam #4. If you absolutely need to use the tool this weekend, Brian Lingg will hold a training session today, March 1, 2019, at 4PM. Please reply to Brian's email invitation if you’d like to attend the training session. Brian Lingg will hold many more training sessions next week, starting on Monday. Brian will send out an email announcing specific times for training Monday morning. The following materials have been setup. Ti, Au, Al, Ni, Cr, Pt, Ag, Ta, C, V. Brian will add more next week. Silva 15:36, 1 March 2019 (PST)
ASML DUV: PM March 12 to 15th
ASML will be performing their periodic maintenance on the DUV stepper from Tuesday March 12th through Friday March 15th. Please schedule your work accordingly. Silva 21:22, 4 March 2019 (PST)
Oxford Dielectric and Ion Mill
The Dielectric and Ion Mill chambers of the Oxford system are down. There is an exhaust issue with both chambers and will be addressed Wednesday March 6, 2019. Silva 17:31, 5 March 2019 (PST)
GCA 6300 Stepper Maintenance
The GCA 6300 Stepper maintenance is scheduled to start Monday April 1, 2019 at 8:30 am. The service should be finished by Wednesday April 3, 2019 at 6:00 pm. Please schedule you process accordingly. Silva 17:56, 5 March 2019 (PST)
GCA Autostep 200 Maintenance
The GCA Autostep 200 maintenance is scheduled to start Monday April 4, 2019 at 8:30 am. The service should be finished the same day by 6:00 pm. Please schedule you process accordingly. Silva 17:56, 5 March 2019 (PST)
IBD Maintenance
The IBD will be down starting Monday March 11, 2019 at 9:00 am for maintenance. This system service will take two to three weeks to complete. Silva 10:22, 7 March 2019 (PST)
ICP Panasonic #2 Chamber Clean
The system will be down starting Monday morning at 9:30 am for a chamber wet clean. The tool should be ready by 11:30 am the same morning for your use. Silva 11:50, 7 March 2019 (PST)
RIE#2
The system is down for front panel switch failure. The issue will be addressed tomorrow. Silva 17:34, 7 March 2019 (PST)