DUV Flood Expose: Difference between revisions
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|picture=DUV.jpg |
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|type = Lithography |
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|location=Bay 6 |
|location=Bay 6 |
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|email=lee_sawyer@ucsb.edu |
|email=lee_sawyer@ucsb.edu |
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|description = Deep UV Flood |
|description = 1000W Deep UV Flood Exposure System (LS-150X-10C2) and Illumination Controller (2130-C2) |
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|manufacturer = AB Manufacturing |
|manufacturer = Bachur & Associates/AB Manufacturing |
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Revision as of 23:35, 2 April 2019
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About
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.
Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.
Detailed Specifications
- DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode
- The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
- Exposure can be performed on a 4" wafer
- Lamps are nominally rated for 400 hours
- A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation
