Template:Announcements: Difference between revisions
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<!------------- Equipment Status ----------------> |
<!------------- Equipment Status ----------------> |
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===== GCA 6300 March Maintenance ===== |
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The GCA 6300 will be down for maintenance beginning 8:30am Monday March 9, 2020 until 6:30pm March 11, 2020. |
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[[User:Silva|Silva]] 10:40, 10 February 2020 (PST) |
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===== GCA Autostep 200 March Maintenance ===== |
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The Autostep 200 will be down for maintenance the morning of March 12, 2020 until late afternoon the same day. |
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[[User:Silva|Silva]] 10:40, 10 February 2020 (PST) |
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===== ASML Maintenance: March 30th ===== |
===== ASML Maintenance: March 30th ===== |
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Revision as of 17:25, 16 March 2020
Equipment Status
ASML Maintenance: March 30th
ASML Stepper #3 periodic maintenance will be on Monday March 30th, system will be down for up to 1.5 weeks. // John d 07:30, 27 January 2020 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)