YES-SPR220-Various-Temps: Difference between revisions
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(add 220-7 etch rates vs temperature) |
(add 220-7 etch rates vs temperature) |
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Pressure drop indicates completion of etch. Once pressure flattens etching is complete. |
Pressure drop indicates completion of etch. Once pressure flattens etching is complete. |
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[[File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png|thumb| |
[[File:YES-SPR220vsTemp.jpg|578x578px]][[File:PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png|thumb|571.804x571.804px|alt=|left]] |
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[[File:YES-SPR220vsTemp.jpg|578x578px]] |
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_vs._Temp(C)_Recipe_STD_O2only_3KW-3min-Temp_(1).png)