RIE Etching Recipes: Difference between revisions
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(Created page with "{{recipes}} =RIE 1 (Custom) = =RIE 2 (MRC) = =RIE 3 (MRC) = =RIE 5 (PlasmaTherm) = =Si Deep RIE (PlasmaTherm/Bosch Etch)=") |
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{{recipes}} |
{{recipes|Dry Etching}} |
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=[[RIE 1 (Custom)]] = |
=[[RIE 1 (Custom)]] = |
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=[[RIE 2 (MRC)]] = |
=[[RIE 2 (MRC)]] = |
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