ICP Etching Recipes: Difference between revisions
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=[[ICP Etch 1 (Panasonic E626I)]]= |
=[[ICP Etch 1 (Panasonic E626I)]]= |
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==SiO Vertical Etch== |
==SiO Vertical Etch== |
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*[[media:Panasonic1-SiO-Etch.pdf|SiO Vertical Etch]] |
*[[media:Panasonic1-SiO-Etch.pdf|SiO Vertical Etch Recipe]] |
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=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
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=[[ICP-Etch (Unaxis VLR)]]= |
=[[ICP-Etch (Unaxis VLR)]]= |
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Revision as of 15:56, 20 August 2012
Back to Dry Etching Recipes.