PECVD Recipes: Difference between revisions
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*[[Media:ICP-PECVD-a-Si-Recipe-90C.pdf|a-Si Deposition Recipe - 90°]] |
*[[Media:ICP-PECVD-a-Si-Recipe-90C.pdf|a-Si Deposition Recipe - 90°]] |
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*[[Media:ICP-PECVD-a-Si-Recipe-250C |
*[[Media:ICP-PECVD-a-Si-Recipe-250C.pdf|a-Si Deposition Recipe - 250°]] |
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Revision as of 22:32, 4 September 2013
Back to Vacuum Deposition Recipes.
PECVD 1 (PlasmaTherm 790)
SiN deposition (PECVD #1)
- SiN Deposition Recipe
- SiN Deposition Particle Thickness Data
- Low Stress Si3N4 - Variable Stress Recipes
- Low Stress Si3N4 - Variable Stress Plot
SiO2 deposition (PECVD #1)
SiOxNy deposition (PECVD #1)
PECVD 2 (Advanced Vacuum)
SiN deposition (PECVD #2)
SiO2 deposition (PECVD #2)
ICP-PECVD (Unaxis VLR)
SiN deposition (Unaxis VLR)
SiN (2% SiH4)
SiN (2% SiH4 - No-Ar)
50° | 100° | 250° |
---|---|---|
SiN (2% SiH4 - No-Ar - Extra N2)
50° | 100° | 250° |
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SiN (100% SiH4 )
50° | 100° | 250° |
---|---|---|
SiO2 deposition (Unaxis VLR)
SiO2 (2% SiH4)
50° | 100° | 250° |
---|---|---|
SiO2 (2% SiH4 - No Ar)
50° | 100° | 250° |
---|---|---|
SiO2 (100% SiH4 HDR)
50° | 100° | 250° |
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SiO2 (100% SiH4 LDR)
50° | 100° | 250° |
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Amorphous Si (100%SiH4 Ar He)
90° | 250° |
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