ICP Etching Recipes

Back to Dry Etching Recipes.

RIE Etch 5 (RIE#5)

GaN Etching (RIE#5)

• [[media:|GaN Etch Recipe]]

ICP Etch 1 (Panasonic E626I)

SiO₂ Etching (Panasonic 1)

• SiO₂ Vertical Etch Recipe
• SiO₂ CHF3 Etch Variations

Cr Etch (Panasonic 1)

• Cr Etch Recipes

GaN Etch (Panasonic 1)

• GaN Etch Recipes

ICP Etch 2 (Panasonic E640)

SiO₂ Etching (Panasonic 2)

• SiO₂ Vertical Etch Recipe

ICP-Etch (Unaxis VLR)

InP Etch (Unaxis VLR)

InP Etch

• InP Etch Recipe (200C)

InP Etch (H₂ Ar)

• InP Etch Recipe (H₂ Ar 200C)

XeF2 Etch (Xetch)

• Si Etch Recipe