RIE Etching Recipes: Difference between revisions
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=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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=[[RIE Etch 5 (RIE#5)]]= |
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==GaN Etching (RIE#5)== |
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*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipe]] |
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=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
=[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]= |
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Revision as of 22:47, 19 September 2013
Back to Dry Etching Recipes.